One recent movie that gave me the chills was the sci-fi horror Pandorum (2009).
Had to watch it in the dark.
I guess that could freak out a new generation.
Poltergeist II was also very scary as a kid, especially the preacher.
After a mysterious blackout, a son goes out to investigate and captures footage of actual aliens. When the aliens follow he and his brothers back to their home all hell breaks lose.